Cleanroom production – in a class of its own

UHP and CFOS manifold systems from Dockweiler meet all the requirements of the semiconductor industry. The prefabricated manifolds are collared and then welded, tested and packaged in a clean room.

High-purity manifold systems are the customized solution for the semiconductor industry. With orbital welds and a 100% helium leak test (leak rate of 1 x 10⁻⁹ mbar l s⁻¹), they offer the highest process reliability for your system.

At Dockweiler, we use DPC and CPC measurement to check the cleanliness of tube systems. This involves measuring the number of particles in a gas stream. DPC measurement makes particles from 0.1 µm visible. The CPC method can also measure smaller particles by enlarging them through condensation. This makes even the smallest particles detectable.

In our own residual gas analysis (RGA) system, we measure the concentration of water, volatile and non-volatile hydrocarbons (such as alcohols, solvents, grease and oils) on stainless steel surfaces after cleaning. The system consists of three chambers: one chamber is used for baking the components as the final cleaning step, while the other two are used for the actual RGA measurement. The system ensures the highest product quality and purity.

Dockweiler offers specialized manufacturing solutions for applications in various industries, including the chemical industry, aerospace engineering, medical technology and research institutions.

One good example is the production of process vessels (bubbler), which ensure a safe supply of high-purity media in the fine chemicals industry. These vessels play an important role in processes such as metal organic vapor phase epitaxy (MOVPE), which is crucial for the production of sensitive optoelectronic components. Precisely manufactured in a clean room and with a high level of impermeability, they offer maximum process reliability and contribute to the quality and efficiency of production.